Miniaturized accelerometer with piezoelectric FET

Details Miniaturized accelerometer with piezoelectric FET Miniaturized accelerometer with piezoelectric FET

1980-07-17

1983-03-29

Miller, J. D.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

73517R, 310 32, 357 26, H01L 2984

Patent

active

043785107

ABSTRACT:
An accelerometer comprising a piezoelectric device hard mounted to the gate electrode of a field effect transistor, thus avoiding the capacitance of an interconnecting coaxial cable connection and providing, therefore, improved frequency response in a smaller, more efficient package.

REFERENCES:
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patent: 3351786 (1967-11-01), Muller et al.
patent: 3426424 (1969-02-01), Touchy
patent: 3569747 (1971-03-01), Siegel
patent: 3585415 (1971-06-01), Muller et al.
patent: 3818426 (1974-06-01), Bonnett et al.
patent: 3973146 (1976-08-01), Arnold et al.
patent: 3978508 (1976-08-01), Vilkomerson
patent: 4047214 (1977-09-01), Francombe et al.
patent: 4104921 (1978-08-01), Nissl
Greeneich et al. "Theoretical Transducer Properties of Piezoelectric Insulator FET Transducers," Jap. v. 46, No. 11, Nov. 1975.
Roylance, L. E. et al., "A Batch-Fabricated Silicon Accelerometer", IEEE Trans. on Electron Devices vol. ED-26, No. 12, Dec. 1979.

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