Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1985-04-11
1986-02-11
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
423349, 427 531, 427 541, 427 86, B05D 306
Patent
active
045698554
ABSTRACT:
A process for forming a deposition film, wherein a gaseous atmosphere of a silicon compound selected from
REFERENCES:
patent: 3101257 (1963-08-01), Hagen et al.
patent: 3661637 (1972-05-01), Sirtl
patent: 3956193 (1976-05-01), Henney et al.
patent: 4448801 (1984-05-01), Fukuda et al.
patent: 4495218 (1985-01-01), Azuma et al.
Eguchi Ken
Haruta Masahiro
Hirai Yutaka
Matsuda Hiroshi
Nakagiri Takashi
Canon Kabushiki Kaisha
Newsome John H.
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