Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1984-05-04
1986-02-11
Niebling, John F.
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
427 38, 427 451, C01B 3100
Patent
active
045697388
ABSTRACT:
A method for producing amorphous carbon coatings on substrates by degrading a gaseous hydrocarbon compound in an ionized gas atomsphere within a reaction chamber. An electromagnetic alternating field is used for the excitation of the plasma. To achieve the object of increasing the deposition rate and permitting substrates even of great surface area to be uniformly coated, the frequency of the electromagnetic alternating field is selected in the microwave region (915 to 2,540 MHz). Furthermore, the microwave energy is put into the gaseous atmosphere by means of at least one ladder-type waveguide situated outside of the reaction chamber. The invention also relates to a substrate provided with an amorphous carbon coating, in which an adhesion-mediating coating consisting of a polymer from the group of the siloxanes or silazanes is provided between the substrate and the amorphous carbon coating.
REFERENCES:
patent: 4060660 (1977-11-01), Carlson
patent: 4365587 (1982-12-01), Hirose
patent: 4478875 (1984-10-01), Pachonik
patent: 4483883 (1984-11-01), Nath
Kieser Jorg
Neusch Michael
Leybold-Heraeus GmbH
Niebling John F.
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