Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent
1992-04-02
1994-02-15
Bell, Mark L.
Cleaning and liquid contact with solids
Processes
Using solid work treating agents
134 10, 134 2211, 134 2212, 134 19, 134 1, 134 34, 134 21, 134166R, 134166C, 15 56, B08B 908
Patent
active
052863018
ABSTRACT:
An apparatus for cleaning the interior surfaces of a vessel which includes a cleaning head supported and guided into the vessel by a rigid air shaft. The cleaning head is supplied with a process fluid and directs and removes the process fluid from a cleaning zone located on the interior surface of the vessel. The process fluid is heated by a heat exchanger hose assembly that is connected to the air shaft. The apparatus utilizes turbulent fluid flow, thermal shock, ultrasonic vibration and/or piezoelectric vibration to dislodge particulates from the inner surfaces of the vessel. The apparatus is useful for cleaning chemical vapor deposition reactors and other similar vessels.
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Bell Mark L.
C.V.D. System Cleaners Corporation
El-Arini Zeinab
LandOfFree
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