Thin film resonator having stacked acoustic reflecting impedance

Wave transmission lines and networks – Coupling networks – Electromechanical filter

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310321, H03H 917

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active

053732685

ABSTRACT:
A frequency selective component and a method for making a frequency selective component. The frequency selective component includes a substrate having at least a first surface and an acoustic impedance transformer coupled to the substrate. The acoustic impedance transformer transforms an acoustic impedance of the substrate to a second acoustic impedance. The acoustic resonator further includes a mechanical resonator disposed on the acoustic impedance transformer. The acoustic resonator provides a frequency selection function.

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"Face-Mounted Piezoelectric Resonators", W. E. Newell, Proceedings of the IEEE, pp. 575-581, Jun. 1965.

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