Method of and apparatus for semi-conductor wafer selection

Details Method of and apparatus for semi-conductor wafer selection Method of and apparatus for semi-conductor wafer selection

1990-11-21

1992-10-06

Smith, Jerry

Boots, shoes, and leggings

36416701, 414416, 414417, 414404, G05B 1546, B65G 6530

Patent

active

051538415

ABSTRACT:
A method and apparatus for lifting select semi-conductor wafers from a quartz wafer boat. A removable transfer platform is provided for receiving a quartz wafer boat and positioning the wafer boat above upwardly extending fingers adapted for engaging wafers disposed therein. The upwardly extending wafer engagement fingers are mounted on a wand that is programmed for select vertical and horizontal movement relative to the wafer boat. The fingers of the wand also include ends adapted for engaging the peripheral edges of the wafer supported within the wafer boat for being lifted therefrom.

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MGI Systems' Expanding The Horizons of Technology, Phoenix Series V2 Wafer Management Systems Brochure.
MGI Systems' Quartz Carriers, A Continued Standard of Excellence Brochure.
Cybeq Systems' Model 2200 PB Indexer with Pusher Bar Brochure.
H-Square Company's Wafer Transfer System HQ-414 Brochure.
MGI Systems' E.T., A Cost Effective Solution to Your Wafer Transfer Needs Brochure.

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