Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor
Patent
1983-02-07
1984-09-11
Dawson, Robert
Adhesive bonding and miscellaneous chemical manufacture
Methods
Surface bonding and/or assembly therefor
29576R, 73432L, 156378, G01B 1106
Patent
active
044708564
ABSTRACT:
A semiconductive substrate, such as a silicon wafer, is mounted on a baseplate for inclusion in an optical device such as a liquid crystal light valve. An optical flat presses the top surface of silicon wafer toward the baseplate and against an O-ring seal surrounding a fluid adhesive. The fluid adhesive hydrostatically distributes the force of compression to guarantee optical flatness and self-compensation for the amount fluid adhesive surrounded by the O-ring. The optical flatness of the semiconductor substrate is limited only by the flatness of the optical flat against which it is compressed. Parallel alignment of the optical flat, the substrate and the baseplate is achieved by reflecting a laser beam through the semiconductive substrate and observing the interference fringes therein, while adjusting the relative alignment so as to maximize the distance between fringes.
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Efron et al., "A Silicon Photoconductor Based Liquid Crystal Light Valve", Society for Information Display Technical Digest, vol. 12, 1981, p. 142.
Brown Roger H.
Efron Uzi
Hoberg Clarence P.
Little Michael J.
Collins D. W.
Dawson Robert
Hughes Aircraft Company
Karambelas A. W.
Rosenberg G. B.
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