Semiconductor production control and/or measuring unit

Details Semiconductor production control and/or measuring unit Semiconductor production control and/or measuring unit

1991-02-07

1992-10-06

Rosenberger, Richard A.

Optics: measuring and testing

For size of particles

By particle light scattering

356339, 2504581, 2504611, G01N 1502, G01N 2164

Patent

active

051536749

ABSTRACT:
A semiconductor production control and measuring unit for a two-dimensional detection and control of concentration and pressure distribution of process particles within a process chamber, which forms part of a semiconductor production device and in the interior of which a vacuum can be generated with the aid of a vacuum pump. A light fan source produces a substantially parallel light fan within the process chamber, the light fan penetrating the area of the process chamber which is to be examined with regard to concentration distribution or pressure distribution, the wavelength of the light emitted by the light fan source being so short that the process particle have imparted thereto an excitation energy sufficient for fluorescent radiation. A camera is disposed at an angle with respect to the light fan and it covers the area to be examined. In the spectral region of the fluorescent radiation of the process particles, the camera has a quantum efficiency which detects the fluorescent radiation. A processing device is connected to the camera and determines the two-dimensional concentration and pressure distribution of the process particles on the basis of the image signals received from the camera.

REFERENCES:
patent: 4291230 (1981-09-01), Heiss
patent: 4380392 (1983-04-01), Karabegov et al.
patent: 4394237 (1983-07-01), Donnelly et al.
patent: 4429995 (1984-02-01), Goulas
patent: 4698308 (1987-10-01), Ikeda
patent: 4745285 (1988-05-01), Recktenwald et al.
patent: 4919536 (1990-04-01), Komine
patent: 4948259 (1990-08-01), Enke et al.
patent: 4986654 (1991-01-01), Meijer et al.
Electro-optical products division ITT, "F4548 Spectroscopic Instrument", Rev. Mar. 1985.

Affiliated with

Also associated with

Rating

Semiconductor production control and/or measuring unit does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor production control and/or measuring unit, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor production control and/or measuring unit will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1193508