Maufacturing method of semiconductor devices

Fishing – trapping – and vermin destroying

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437 27, 437162, 437150, H01L 21265

Patent

active

051531461

ABSTRACT:
Formed on the element region of an n-type semiconductor substrate is a silicon oxide layer, on which a polysilicon layer is formed. Boron ions, p-type impurities, are then implanted into the polysilicon layer, from which boron diffuses into the element region via the silicon oxide layer, with the result that a p-channel region of the p-channel MOS transistor is formed.

REFERENCES:
patent: 4764478 (1988-08-01), Hiruta
patent: 5091328 (1992-02-01), Miller

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