Illumination optical apparatus containing an optical integrator

Details Illumination optical apparatus containing an optical integrator Illumination optical apparatus containing an optical integrator

1996-05-29

1998-08-04

Moses, R. L.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 71, G03B 2742, G03B 2754, G03B 2772

Patent

active

057902399

ABSTRACT:
An illumination optical apparatus has an optical integrator and a condenser optical system. The optical integrator has first and second stages in which a plurality of lens elements each having a rectangular lens surface with long and short sides are arranged while the short sides are set adjacent to each other. The first and second stages are arranged adjacent to each other. A position where the short sides are adjacent to each other in the first stage is different from that in the second stage along a longitudinal direction. Therefore, in the illumination optical apparatus, a resolution difference between a pattern along the vertical direction and that in the horizontal direction caused by a rectangular illuminated area with long and short sides or an arcuated illuminated area can be prevented, so that resolution with a uniform line width can be achieved.

REFERENCES:
patent: 4497015 (1985-01-01), Konno et al.
patent: 4918583 (1990-04-01), Kudo et al.
patent: 4939630 (1990-07-01), Kikuchi et al.
patent: 5237367 (1993-08-01), Kudo
patent: 5245384 (1993-09-01), Mori
patent: 5307207 (1994-04-01), Ichihara
patent: 5594526 (1997-01-01), Mori et al.
patent: 5594587 (1997-01-01), Komatsuda et al.
patent: 5631773 (1997-05-01), Suzuki
patent: 5636003 (1997-06-01), Tanitsu et al.
patent: 5644390 (1997-07-01), Yasuzato

Affiliated with

Also associated with

Rating

Illumination optical apparatus containing an optical integrator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Illumination optical apparatus containing an optical integrator , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Illumination optical apparatus containing an optical integrator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1183493