Method of manufacturing an ink ejection recording head and a rec

Details Method of manufacturing an ink ejection recording head and a rec Method of manufacturing an ink ejection recording head and a rec

1996-12-09

1998-08-04

Wong, Peter S.

Incremental printing of symbolic information

Ink jet

Ejector mechanism

347 65, 338308, 257537, B41J 205, H01C 1012, H01L 2900

Patent

active

057901546

ABSTRACT:
In an ink ejection recording head, a silicon dioxide layer is formed on the surface of a silicon substrate, a silicon nitride layer is formed on the silicon dioxide layer, and a plurality of heaters are formed on the silicon nitride layer. The heater is constituted by a thin film resistor made from a Ta--Si--O alloy and a thin film conductor made from nickel. Further, a gold layer is formed through plating on at least a portion of the thin film conductor to be connected to another conductor prior to thermally oxidizing the heaters.

REFERENCES:
patent: 4429321 (1984-01-01), Matsumoto
patent: 4862197 (1989-08-01), Stoffel
patent: 5045870 (1991-09-01), Lamey et al.
patent: 5081473 (1992-01-01), Hawkins et al.
patent: 5081474 (1992-01-01), Shibata et al.
patent: 5122812 (1992-06-01), Hess et al.
patent: 5478606 (1995-12-01), Ohkuma et al.
patent: 5666140 (1997-09-01), Mitani et al.
Nikkei Mechanical, Dec. 28, 1992, pp. 58-63.

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