Dielectric thin film composition and thin-film EL device using s

Electric lamp and discharge devices – With luminescent solid or liquid material – Solid-state type

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313509, 313505, H01J 170

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active

057898600

ABSTRACT:
A thin-film electroluminescent device includes dielectric layers having improved dielectric characteristics. The device is fabricated by forming a first transparent electrode layer of ITO, a first dielectric layer, a luminescent layer, a second dielectric layer, and a second transparent electrode layer of ITO in this order on an insulating substrate. Each of the two dielectric layers is a film constituted by TaSnON. That is, the film includes tantalum, tin, oxygen, and nitrogen.

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R.G. Wilson et al, "Secondary Ion Mass Spectrometry", Practical Handbook for Depth Profiling and Bulk Impurity Analysis, Jun. 1989, pp. 3.1-1--3.1-4.

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