Boots – shoes – and leggings
Patent
1997-08-01
1999-10-05
Grant, William
Boots, shoes, and leggings
364153, 364180, 36446828, G06F 1900, H01L 2100
Patent
active
059634499
ABSTRACT:
An interlock apparatus for a transfer machine includes a drive unit for driving the arms of a transfer machine for transferring a substrate such as an LCD substrate. The apparatus also includes a control unit having a monitor function for monitoring a parameter representing the movement condition of the arms and stopping the drive unit when the parameter exceed a predetermined value. The apparatus also includes a switching function for selectively switching the predetermined value between a teaching mode in which the position of the arm is controlled and a practical operation mode in which the transfer machine is actually operated.
REFERENCES:
patent: Re34399 (1993-10-01), Gami et al.
patent: 4663009 (1987-05-01), Bloomquist et al.
patent: 4836733 (1989-06-01), Hertel et al.
patent: 4975856 (1990-12-01), Vold et al.
Iwasaki Tatsuya
Ota Yoshiharu
Tanoue Shinya
Yoshida Masaaki
Garland Steven R.
Grant William
Tokyo Electron Limited
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