Micromechanical xyz stage for use with optical elements

Details Micromechanical xyz stage for use with optical elements Micromechanical xyz stage for use with optical elements

1997-09-23

1999-10-05

Spyrou, Cassandra

Optical: systems and elements

Compound lens system

Microscope

359393, 310309, G02B 2126, H02N 100

Patent

active

059633670

ABSTRACT:
A micromachined xyz stage, and microscopes utilizing such a stage, are disclosed. The xyz stage includes co-planar x- and y-drive means linked to a sample stage. Such x- and y- drive means are operable to position the sample stage in an x-y plane. The xyz stage further includes z-drive operable to moves the sample stage out of the x-y plane. The z-drive can be implemented by suspending a flat-plate electrode over the sample stage using hinged plate supports. As a voltage is applied across the plate electrode and the sample stage, an electrostatic force is generated, causing the sample stage to move towards the plate electrode. The hinged plate supports facilitate assembly of the z-drive, in addition to providing support for it in its assembled configuration. By incorporating an optical fiber, the aperture of which has be drawn down to submicron size, a near-field scanning optical microscope can be formed. By forming a micromachined tip on the xyz stage, a scanning tunneling microscope or an atomic force microscope can be formed.

REFERENCES:
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patent: 5536988 (1996-07-01), Zhang et al.
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patent: 5554851 (1996-09-01), Hirai et al.
Fan et al., "Self-Assembled Microactuated XYZ Stages for Optical Scanning and Alignment," Transducers '97, 1997 Int'l Conf. Solid State Sensors and Actuators, Chicago, Jun. 16-19, 1997, pp. 319-322.
Indermuehle et al., "Design and Fabrication of an Overhanging XY-Microactuator with Integrated Tip for Scanning Surface Profiling," v. 43, Sensors and Actuators A, pp. 346-350 (1994).
Betzig et al., "Near-Field Optics: Microscopy, Spectroscopy, and Surface Modification Beyond the Diffraction Limit," vol. 257 Science, pp. 189-195 (Jul. 10, 1992).

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