Method of making corrugated cell contact

Details Method of making corrugated cell contact Method of making corrugated cell contact

1996-08-23

1998-08-04

Tsai, Jey

Fishing, trapping, and vermin destroying

437 60, 437919, H01L 218242

Patent

active

057892679

ABSTRACT:
A method of forming a cell contact that has improved structural strength and break-down resistance and a cell contact produced by such method are provided. The method utilizes an oxide spacer consisting of a plurality of oxide layers deposited by two alternating methods of thermal CVD and plasma CVD. After a straight contact opening is first etched by a plasma etching technique, the hole is again etched by an etchant such as hydrogen fluoride which has a high selectivity toward oxide layers formed by the plasma CVD method and a low selectivity toward oxide layers formed by the thermal CVD method. As a result, a contact opening having a corrugated side-wall is formed and into which a polysilicon is deposited to substantially fill the hole. A cell contact having a corrugated side-wall configuration is thus formed which presents improved structural rigidity and break-down resistance. A layer of rugged polysilicon layer may optionally be deposited before the deposition of the polysilicon into the contact opening to further increase the surface area of the cell contact.

REFERENCES:
patent: 5460999 (1995-10-01), Hong et al.
patent: 5478769 (1995-12-01), Lim
patent: 5637523 (1997-06-01), Fazan et al.

Affiliated with

Also associated with

Rating

Method of making corrugated cell contact does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making corrugated cell contact, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making corrugated cell contact will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1176359