Method of manufacturing blue light-emitting device by using BCL3

Details Method of manufacturing blue light-emitting device by using BCL3 Method of manufacturing blue light-emitting device by using BCL3

1997-02-12

1998-08-04

Bowers, Jr., Charles L.

Fishing, trapping, and vermin destroying

437129, 437126, 437133, 1566551, H01L 100

Patent

active

057892652

ABSTRACT:
A method of manufacturing blue light-emitting device is disclosed wherein a laminated structure comprising a p-type In.sub.x Al.sub.y Ga.sub.1-x-y N layer and an n-type In.sub.x Al.sub.y Ga.sub.1-x-y N layer are etched selectively by virtue of a parallel plate type plasma etching (RIE) using etching gas including boron trichloride (BCl.sub.3) and chlorine (Cl.sub.2).

REFERENCES:
patent: 5030590 (1991-07-01), Amini et al.
patent: 5247533 (1993-09-01), Okazaki et al.
patent: 5273933 (1993-12-01), Hatamo et al.
patent: 5316979 (1994-05-01), MacDonald et al.

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