Optical system for measuring a surface profile of an object usin

Details Optical system for measuring a surface profile of an object usin Optical system for measuring a surface profile of an object usin

1988-05-16

1990-02-13

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356376, G01B 1124, G01V 904

Patent

active

049009400

ABSTRACT:
In a system for measuring a surface profile of an object in relation to a reference surface, a laser beam emitted from a laser 1 is converged by a convergent lens 3 and is incident on the surface of the object at an incident angle. The laser beam reflected from the object surface is also converged by the convergent lens 3 on a reference position of a detector 5 to form a beam spot thereon. When the converged laser beam is incident on a trench of the object, the beam spot formed on the detector 5 is deviated from the reference position and the detector 5 generates a deviation signal in accordance with a deviation of the beam spot. The convergent lens 3 is moved by an actuator 8 in accordance with the position signal so that the beam spot on the detector 5 is moved to a reference position. The movement of the convergent lens 3 is detected by a position detector 5 which generates a position signal. A height signal processor 6 processes the deviation and position signals the generates a height signal denoting a height of the trench.

REFERENCES:
patent: 4473750 (1984-09-01), Oshida et al.
patent: 4558949 (1985-12-01), Uehara et al.
patent: 4667113 (1987-05-01), Nakajima et al.
patent: 4677302 (1987-06-01), Chiu et al.
patent: 4707610 (1987-11-01), Lindow et al.
patent: 4732473 (1988-03-01), Bille et al.
patent: 4748335 (1988-05-01), Lindow et al.

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