Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1996-08-08
1999-10-05
Nguyen, Nam
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
20429815, 20429823, 20429826, 20429827, 20429828, 20429831, 20429835, 118719, 118724, 118729, 118730, 134 76, 134 83, C23C 1434
Patent
active
059617985
ABSTRACT:
A system and method are provided for vacuum coating articles that includes a means for moving the articles in semi-continuous fashion successively through a series of vacuum chambers. A carousel is transported successively through each of the vacuum chambers that rotates the articles in an epicycloidal fashion. A means is also provided for precisely and reproducibly loading and unloading the carousel with the article.
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DeWald, Jr. Arthur Bruce
Frederick Kenneth Henry
Napolitano Philip Anthony
Remus Ronald Lee
Robinson Merrill Gene
Diamond Black Technologies, Inc.
McDonald Rodney G.
Nguyen Nam
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