Thin-film photoelectric conversion device and a method of manufa

Details Thin-film photoelectric conversion device and a method of manufa Thin-film photoelectric conversion device and a method of manufa

1997-08-19

1999-10-05

Chapman, Mark

Batteries: thermoelectric and photoelectric

Photoelectric

Cells

136261, 257 49, 257 75, 438 58, 438476, 438488, 438491, H01L 3100

Patent

active

059617438

ABSTRACT:
A method of manufacturing a thin-film solar cell, comprising the steps or: forming an amorphous silicon film on a substrate; holding a metal element that accelerates the crystallization of silicon in contact with the surface of the amorphous silicon film; subjecting the amorphous silicon film to a heat treatment to obtain a crystalline silicon film; depositing a silicon film to which phosphorus has been added in close contact with the crystalline silicon film; and subjecting the crystalline silicon film and the silicon film to which phosphorus has been added to a heat treatment.

REFERENCES:
patent: 5244819 (1993-09-01), Jue
patent: 5275851 (1994-01-01), Fonash et al.
patent: 5403772 (1995-04-01), Zhang et al.
patent: 5608232 (1997-03-01), Yamazaki et al.
patent: 5700333 (1997-12-01), Yamazaki et al.

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