Surface type microelectronic gas and vapor sensor

Details Surface type microelectronic gas and vapor sensor Surface type microelectronic gas and vapor sensor

1987-07-15

1990-02-13

Walton, Donald L.

Chemistry: electrical and wave energy

Processes and products

204412, 204280, G01N 2726

Patent

active

049004050

ABSTRACT:
The present invention is concerned with electrode structures and microsensors having fast response times and high sensitivity and to methods using such structures and/or microsensors. This is accomplished in any one of several ways. In one, the sensing and counter electrodes are positioned close enough together on an active area so that ion migration therebetween is fast. The thickness of the electrolytic medium on the active area is restricted to be no more than about 10 microns so that diffusion therethrough between the electrodes is at least as fast as the ion migration. In another, the sensing electrode may have outwardly extending portions extending beyond the electrolytic medium and not being covered thereby. Or, conductive particles can be distributed in the electrolytic medium. Or the medium can be very thin. Or, the electrodes can be interdigited. Combinations of the above structural features are also set forth.

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