Polishing apparatus

Details Polishing apparatus Polishing apparatus

1998-02-10

1999-10-05

Rose, Robert A.

Abrading

Machine

Rotary tool

451494, B24B 722

Patent

active

059613785

ABSTRACT:
A polishing apparatus is provided with a turn table, on which an air passage is formed, and a polishing pad mount plate, on which a polishing pad is stuck. The polishing pad mount plate is detachably attached on the turn table. When the polishing pad mount plate is detached from the turn table, a separation fluid supplying part supplies air as separation fluid between the turn table and the polishing pad mount plate through the air passage.

REFERENCES:
patent: 1291572 (1919-01-01), Lorenz
patent: 5584750 (1996-12-01), Ishida et al.
patent: 5704827 (1998-01-01), Nishi et al.

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