Method of fabricating a semiconductor device

Details Method of fabricating a semiconductor device Method of fabricating a semiconductor device

1988-11-23

1990-12-25

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 72, H01L 21302

Patent

active

049803115

ABSTRACT:
A semiconductor device and method of fabrication thereof includes both narrow and wide element isolation regions which have been fabricated employing a trench isolation technique. The technique allows for the production of wide element isolation regions in submicron semiconductor devices wherein the entire wide element isolation region is covered with an insulating material.

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