Surface etched shadow mask

Details Surface etched shadow mask Surface etched shadow mask

1989-04-20

1990-12-25

Zimmerman, John J.

Stock material or miscellaneous articles

All metal or with adjacent metals

Having aperture or cut

118504, 118721, C23C 1604, B05D 132, B05C 1302

Patent

active

049802402

ABSTRACT:
A scratch reducing shadow mask for providing vapor deposition patterns of bonding metals onto a surface of a die. The shadow mask comprises a top surface and a bottom surface which define a plurality of vias for permitting vaporized bonding metals to pass through the mask. Mask bottom surface comprises a plurality of recessed regions to minimize the contact area of the mask with the die during the vapor deposition process.

REFERENCES:
patent: 2341702 (1944-02-01), Duggan
patent: 3276423 (1966-10-01), Triller
patent: 3286690 (1966-11-01), McGlasson et al.
patent: 3574012 (1971-04-01), Penberg
patent: 3678892 (1972-07-01), Fairchild
patent: 3688740 (1972-09-01), Gesche
patent: 3780700 (1973-12-01), LaFleur et al.
patent: 3824014 (1974-07-01), Abita
patent: 4256532 (1981-03-01), Magdo et al.
patent: 4391034 (1983-07-01), Stuby
patent: 4669416 (1987-06-01), Delgado et al.

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