Wafer retaining mechanism

Details Wafer retaining mechanism Wafer retaining mechanism

1998-01-13

1999-10-05

Sewell, Paul T.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

206454, B65D 8548

Patent

active

059609591

ABSTRACT:
Disclosed is an improved wafer retaining mechanism comprising a canopy, and more than one set of retaining mechanisms affixed to appropriate locations of the canopy, the retaining mechanism being operative in coordination with wafers received within a wafer cassette and a chassis for urging the wafers in place. The wafer retaining mechanisms each comprises a link unit including a sliding rod, a lower link, a front link, an upper link, and associated pins, wherein thc link unit is featured with openings at respective pivots to serve as engaging sections which, in response to proper external forces, engage or disengage components of the link unit from respective pins so as to facilitate assembly or disassembly of the link unit.

REFERENCES:
patent: 4739882 (1988-04-01), Parikh et al.
patent: 4815912 (1989-03-01), Maney et al.
patent: 4886169 (1989-12-01), Ayers et al.
patent: 5452795 (1995-09-01), Gallagher et al.
patent: 5740845 (1998-04-01), Bonora et al.

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