Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1989-02-22
1990-12-25
Willis, Davis L.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
250237G, 356374, G01B 902
Patent
active
049798278
ABSTRACT:
An averaged diffraction moire position detector has a pair of diffraction gratings. One of the gratings has two grating portions arranged with an offset of half a pitch of the transit portions and the non-transit portions for light. The intensities of light passing through respective grating portions are added to cancel any error component is displacement signals produced when two parts of, for example, a machine tool move. Another averaged diffraction moire position detector uses offset in phase of respective error components contained in the diffracted light of plus and minus of the same number-order. Thus, the intensities of respective diffracted light are added to cancel respective error components, resulting in correct displacement signals being produced.
REFERENCES:
patent: 4278273 (1988-10-01), Michel
patent: 4776701 (1988-10-01), Pettigrew
Kabushiki Kaisha Okuma Tekkosho
Koren Matthew W.
Willis Davis L.
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