Nonvolatile semiconductor memory and driving method and fabricat

Details Nonvolatile semiconductor memory and driving method and fabricat Nonvolatile semiconductor memory and driving method and fabricat

1998-11-24

2000-08-08

Nelms, David

Static information storage and retrieval

Floating gate

Particular biasing

36518501, G11C 1604

Patent

active

061011282

ABSTRACT:
The nonvolatile semiconductor memory of this invention includes: a semiconductor substrate; a plurality of memory cells formed in a matrix on the semiconductor substrate, each of the memory cells including a first insulating film formed on the semiconductor substrate, a floating gate formed on the first insulating film, and a control gate formed on the floating gate via a second insulating film sandwiched therebetween, a source diffusion region, and a drain diffusion region; a diffusion layer formed in a portion of the semiconductor substrate located between two of the memory cells adjacent in a first direction, the diffusion layer including the drain diffusion region for one of the two memory cells and the source diffusion region for the other memory cell; a word line formed by connecting the control gates of the memory cells lined in the first direction; and a bit line formed by connecting the diffusion layers lined in a second direction substantially perpendicular to the first direction, wherein the memory cells have a structure in which a tunnel current flows between the drain diffusion region and the floating gate of one of the two adjacent memory cells via the first insulating film when a predetermined voltage is applied to the diffusion layer and no tunnel current flows between the diffusion layer and the floating gate of the other memory cell.

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