Method of making an optical element mold with a hard carbon film

Details Method of making an optical element mold with a hard carbon film Method of making an optical element mold with a hard carbon film

1991-04-10

1993-04-13

Jones, W. Gary

Coating processes

Mold coating

Metal mold

427133, 427249, 427331, 4273722, 427523, 427577, 2491141, 249134, 6537413, 6537415, 65 26, 65305, C03B 1902, C03B 4002, C03B 40033

Patent

active

052021564

ABSTRACT:
This specification discloses a mold for use for press-molding an optical element, characterized in that at least the molding surface of a mold base material is coated with an a-C:H film containing 5-40 atom % of hydrogen therein and having a film density of 1.5 g/cm.sup.3 or more, and with hard carbon film containing 0-5 atom % of hydrogen therein and having a spin density of 1.times.10.sup.18 spin/cm.sup.3 or less and a film density of 1.5 g/cm.sup.3 or more.

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F. W. Smith, "Optical Properties and Local Atomic Bonding In Hydrogenated Amorphous Carbon And Silicon-Carbon Alloys", Materials Science Forum, vols. 52 and 53, 1989, pp. 323-340.

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