Method of making stacked textured container capacitor

Details Method of making stacked textured container capacitor Method of making stacked textured container capacitor

1991-01-22

1992-01-21

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 47, 437 48, 437 60, 437228, 437233, 437919, 357 236, H01L 2170

Patent

active

050827979

ABSTRACT:
A stacked textured container capacitor (STCC) using a modified stacked capacitor storage cell fabrication process. The STCC is made up of a texturized polysilicon structure, having an elongated u-shaped cross-section, located at a buried contact and extending to an adjacent storage node overlaid by polysilicon with a dielectric sandwiched in between. With the 3-dimensional shape and texturized surface of a polysilicon storage node plate substantial capacitor plate surface area of 200% or more is gained at the storage node.

REFERENCES:
"A Spread Stacked Capacitor (SSC) Cell for 64MBIT Drams" by S. Inoue, et al., IEDM 89-31, pp. 31-34.
"3-Dimensional Stacked Capacitor Cell for 16M and 64M Drams" by T. Ema et al., IEDM 88, pp. 592-595.

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