Micro-dimensional measurement apparatus

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Details

364560, 250560, 356398, 356394, G01B 1102, G01B 1100

Patent

active

049949900

ABSTRACT:
In micro-dimensional measurement apparatus including an optical scanning system and a processor for optical data obtained therefrom the measurement is based upon a comparison of previously prepared reference data and optical data from an object to be measured, and features use of a twin laser beam in the scanning operation.

REFERENCES:
patent: 3373380 (1968-03-01), Adler
patent: 3644742 (1972-02-01), Brienza
patent: 4499383 (1985-02-01), Loose
patent: 4650330 (1987-03-01), Fujita
patent: 4679941 (1987-07-01), Fujita

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