Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1992-06-29
1993-11-09
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
359368, H01J 314
Patent
active
052605698
ABSTRACT:
A scanning microscope comprises a sample supporting member on which a sample is supported, a light source which produces a light beam, a light projecting optical device with which an image of the light beam is formed as a small beam spot on the sample, and a light receiving optical device with which the light radiated out of the sample is condensed and an image of the condensed light is formed as a point image. A photodetector detects the point image. A movable member supports at least part of the light projecting optical device and at least part of the light receiving optical device together. The movable member is reciprocally moved such that the beam spot may scan the sample in a one-dimensional scanning direction. The light source is located on the side outward from the movable member. The light projecting optical device is provided with a collimating optical device for collimating the light beam, which has been produced by the light source, on the side outward from the movable member and guiding the collimated light beam to a direction parallel to the scanning direction, and a mirror, which is secured to the movable member and which reflects the collimated light beam towards the sample supporting member.
REFERENCES:
patent: 4363962 (1982-12-01), Shida
patent: 5081350 (1992-01-01), Iwasaki et al.
patent: 5140572 (1992-08-01), Kibune et al.
Davenport T.
Fuji Photo Film Co. , Ltd.
Nelms David C.
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