Infrared detector with Fabry-Perot interferometer

Details Infrared detector with Fabry-Perot interferometer Infrared detector with Fabry-Perot interferometer

1995-07-07

1996-12-31

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

2503381, G01J 510

Patent

active

055896898

ABSTRACT:
The invention relates to a silicon micromechanically fabricated infrared detector having an infrared radiation absorbing layer (7, 44) deposited on an insulating substrate and a detector (11, 24, 25) for detecting the amount of radiation absorbed in the metallic absorbing layer. According to the invention, on the path of the radiation, prior to the absorbing layer (7, 44) is located an electrically controllable Fabry-Perot interferometer (1, 2, 5) manufactured by silicon micromechanical techniques and having the absorbing layer (7, 44) integrally coupled with one of the mirrors (1, 2) thereof).

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K. Aratani et al., "Surface Micromachined Tuneable Interferometer Array", The 7th International Conference on Solid-State Sensors and Actuators, 1993. no month.
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S. Bauer et al., "Thin Metal Films As Absorbers for Infrared Sensors", Sensors and Actuators A, 37-38 (1993) pp. 497-501. no month.
R. Lenggenhager et al., "Improved Thermoelectric Infrared Sensor Using Double Poly CMOS Technology", The 7th International Conference on Solid-State Sensors and Actuators, 1993, p. 1008. no month.

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