Method of making a thin film transistor

Fishing – trapping – and vermin destroying

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437 24, 437 37, 437229, 437235, H01L 2978

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049944010

ABSTRACT:
A source electrode and a drain electrode are formed apart on an insulating substrate, and a semiconductor layer is formed on the substrate between the source and drain electrodes. An insulating organic molecular film is formed all over the source and drain electrodes and the semiconductor layer. Ions are implanted into a selected top surface region of the insulating organic molecular film, corresponding to the semiconductor layer, by which chains of molecules in the surface region are cut to form free carbon, providing a conductive gate electrode.

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Seki, "Method of Matching the Gate to the Source-Drain Gap in a TFT", IBM Technical Disclosure Bulletin, vol. 7, No. 4, Sep. 1964, pp. 338-339.
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Sze, Physics of Semiconductor Devices, John Wiley & Sons, 1969, pp. 568-586.

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