Measuring and testing – Volume or rate of flow – Thermal type
Patent
1992-06-12
1995-03-21
Chilcot, Jr., Richard E.
Measuring and testing
Volume or rate of flow
Thermal type
G01F 168
Patent
active
053985494
ABSTRACT:
A flowmeter sensor includes a sensor tube, and a heater/resistor through which the sensor tube passes. The heater/resistor includes a substantially cylindrical sleeve fitted around the sensor tube and made of ceramic. A thin film of platinum is deposited on the sleeve and is then partially removed by a laser to provide a helical resistance pattern. A pair of electrically conductive rings are tightly fitted around opposite ends of the ceramic sleeve and serve as bases to be connected with a corresponding pair of leads.
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Chilcot Jr. Richard E.
MKS Japan Inc.
Patel Harshad
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