Multiple angle spectroscopic analyzer utilizing interferometric

Details Multiple angle spectroscopic analyzer utilizing interferometric Multiple angle spectroscopic analyzer utilizing interferometric

1993-07-16

1995-05-02

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356355, 356357, 356369, 356381, 356382, G01B 902

Patent

active

054124735

ABSTRACT:
An optical measurement device is disclosed for evaluating the parameters of a sample. The device includes a polychromatic source for generating a probe beam. The probe beam is focused on the sample surface. Individual rays within the reflected probe beam are simultaneously analyzed as a function of the position within the beam to provide information at multiple wavelengths. A filter, dispersion element and a two-dimensional photodetector array may be used so that the beam may be simultaneously analyzed at multiple angles of incidence and at multiple wavelengths. A variable image filter is also disclosed which allows a selection to be made as to the size of the area of the sample to be evaluated.

REFERENCES:
patent: 3527536 (1970-09-01), Alpen
patent: 3904293 (1975-09-01), Gee
patent: 4653924 (1987-03-01), Itonaga et al.
patent: 4872758 (1989-10-01), Miyazaki et al.
patent: 4999014 (1991-03-01), Gold et al.
patent: 5018863 (1991-05-01), Vareille et al.
patent: 5042951 (1991-08-01), Gold et al.
patent: 5159412 (1992-10-01), Willenborg et al.
patent: 5166752 (1992-11-01), Spanier et al.
patent: 5181080 (1993-01-01), Fanton et al.
patent: 5291269 (1994-03-01), Ledger
P. S. Hauge, "Optical Film Thickness Measurement Tool," IBM Technical Disclosure Bulletin, vol. 21, No. 2, Jul. 1978, pp. 884-885.
"Apparatus and Method for Film Thickness and Optical Constant Determination," IBM Technical Disclosure Bulletin, vol. 31, No. 8, Jan. 1989, pp. 363-368.
Dr. R. F. Spanier, "Ellipsometry A Century Old New Technique," Industrial Research, Sep. 1975, pp. 73-76.
Spindler & Hoyer Brochure, "Retardation Plates," pp. S15-S20.
A. F. H. Goetz, "High Resolution Imaging Spectrometer (HIRIS): Science and Instrument," International Journal of Imaging Systems and Technology, vol. 3, 1991, pp. 131-143.
M. Herring, J. E. Duval & S. A. Macenka, "Development of the imaging spectrometer: technical challenges and solutions," Optical Systems for Space Applications, SPIE vol. 810, pp. 100-111.
Patent Cooperation Treaty PCT International Search Report, date of mailing Nov. 11, 1994, 7 pages in length.

Affiliated with

Also associated with

Rating

Multiple angle spectroscopic analyzer utilizing interferometric does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multiple angle spectroscopic analyzer utilizing interferometric , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multiple angle spectroscopic analyzer utilizing interferometric will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1141557