Vaporizer for vacuum coating apparatus

Details Vaporizer for vacuum coating apparatus Vaporizer for vacuum coating apparatus

1992-02-14

1993-11-09

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20419212, 20429812, 20429819, C23C 1434

Patent

active

052599418

ABSTRACT:
A vaporizer is described for use in an apparatus for the coating of substrate under vacuum, the vaporizer comprising a holder and a target plate releasably securable to the holder, with the target plate being acted on at its rear side by a coolant medium which flows through the holder. In order to make rapid interchange of the target plate possible while simultaneously optimizing the cooling, the target plate is fixed to the holder via a clamped connection with intermeshing clamping surfaces.

REFERENCES:
patent: 4169031 (1979-09-01), Brors
patent: 4209375 (1980-06-01), Gates et al.
patent: 4318796 (1982-03-01), Nishiyama et al.
patent: 4434042 (1984-02-01), Keith
patent: 4448652 (1984-05-01), Pachonik
patent: 4468313 (1984-08-01), Okumura et al.
patent: 4517070 (1985-05-01), Kisner
patent: 4966676 (1990-10-01), Fukasawa et al.

Affiliated with

Also associated with

Rating

Vaporizer for vacuum coating apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vaporizer for vacuum coating apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vaporizer for vacuum coating apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1140240