Thin film actuated mirror array

Details Thin film actuated mirror array Thin film actuated mirror array

1995-06-07

1996-12-31

Powell, William

Etching a substrate: processes

Forming or treating optical article

216 97, B44C 122

Patent

active

055890849

ABSTRACT:
A thin film actuated mirror for an actuated mirror array includes a pedestal and at least piezoelectric structure cantilevered from the pedestal. The piezoelectric structure includes a layer of piezoelectric material having two opposing surfaces. Each of two metal electrodes are mounted on a respective one of the opposing surfaces of the piezoelectric material layer. An electrical signal is applied across the piezoelectric material, between the electrodes, causing deformation of the piezoelectric material. The thin film actuated mirror further includes a mirror surface interconnected to the piezoelectric material layer such that the mirror surface deforms in response to the deformation of the piezoelectric material layer.

REFERENCES:
patent: 4885055 (1989-12-01), Woodbury et al.
patent: 5364742 (1994-11-01), Fan et al.

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