Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing
Patent
1995-05-03
1996-12-31
Kunemund, Robert
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
With means for measuring, testing, or sensing
117106, 117108, 118715, C30B 2516
Patent
active
055889956
ABSTRACT:
A system for monitoring the growth of crystalline films on stationary or rotating substrates includes a combination of some or all of the elements including a photodiode sensor for detecting the intensity of incoming light and converting it to a measurable current, a lens for focusing the RHEED pattern emanating from the phosphor screen onto the photodiode, an interference filter for filtering out light other than that which emanates from the phosphor screen, a current amplifier for amplifying and convening the current produced by the photodiode into a voltage, a computer for receiving the amplified photodiode current for RHEED data analysis, and a graphite impregnated triax cable for improving the signal to noise ratio obtained while sampling a stationary or rotating substrate. A rotating stage for supporting the substrate with diametrically positioned electron beam apertures and an optically encoded shaft can also be used to accommodate rotation of the substrate during measurement.
REFERENCES:
patent: 5100832 (1992-03-01), Kitagawa et al.
patent: 5122222 (1992-06-01), Turner et al.
patent: 5200021 (1993-04-01), Kawai et al.
patent: 5238525 (1993-08-01), Turner et al.
patent: 5270797 (1993-12-01), Pollack et al.
Kunemund Robert
Midwest Research Institute
O'Connor Edna M.
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