Method of producing sheets of crystalline material and devices m

Details Method of producing sheets of crystalline material and devices m Method of producing sheets of crystalline material and devices m

1995-06-06

1996-12-31

Kunemund, Robert

Single-crystal, oriented-crystal, and epitaxy growth processes;

Forming from vapor or gaseous state

With decomposition of a precursor

117 94, 117 95, 117 97, 117913, C30B 2906

Patent

active

055889948

ABSTRACT:
A method of producing sheets of crystalline material is disclosed, as well as devices employing such sheets. In the method, a growth mask is formed upon a substrate and crystalline material is grown at areas of the substrate exposed through the mask and laterally over the surface of the mask to form a sheet of crystalline material. This sheet is optionally separated so that the substrate can be reused. The method has particular importance in forming sheets of crystalline semiconductor material for use in solid state devices.

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