Electric heating – Inductive heating – With heat exchange
Patent
1994-04-05
1995-11-21
Leung, Philip H.
Electric heating
Inductive heating
With heat exchange
219635, 219644, 134 1, H05B 610
Patent
active
054689376
ABSTRACT:
A pipe impurity removing apparatus and process is provided, in which moisture adhered on the inner peripheral surface of a supply line can be surely removed, regardless of the pre- or post-completion of a piping execution, and the reduction of its working time can be aimed at. The inner peripheral surface of a pipe 30 which constitutes a supply line 3 for a semiconductor manufacturing unit, is coated or surface-modified with chromium oxide 6 which is a dielectric. A purge gas is caused to flow through the pipe 30 from the upperstream side to the downstream side, and an impurity remover 7 is engaged with the pipe 30 and high-frequency induction heating is applied thereto to heat the chromium oxide 6, whereby moisture adsorbed on the chromium oxide 6 is exhausted and removed together with the purge gas indicated by an arrowmark from the inside of the pipe 30 to the atmosphere.
REFERENCES:
patent: 3092514 (1963-06-01), Tomberlin
patent: 3615823 (1971-10-01), Tuma et al.
patent: 3644696 (1972-07-01), Magner, Jr. et al.
patent: 3923653 (1975-12-01), Lavins, Jr.
patent: 4511407 (1985-04-01), Steininger
patent: 4576698 (1986-03-01), Gallagher et al.
Leung Philip H.
Teisan Kabushiki Kaisha
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