Electrically programmable antifuse incorporating dielectric and

Details Electrically programmable antifuse incorporating dielectric and Electrically programmable antifuse incorporating dielectric and

1993-01-19

1995-05-02

Hearn, Brian E.

Fishing, trapping, and vermin destroying

148DIG55, 257 50, 257530, 257355, 257546, H01L 2144

Patent

active

054119170

ABSTRACT:
An antifuse may be fabricated as a part of an integrated circuit in a layer located above and insulated from the semiconductor substrate. The antifuse includes a lower first electrode, a first dielectric layer disposed over the lower first electrode, a layer of amorphous silicon disposed above the first dielectric layer, a second dielectric layer disposed above the amorphous silicon layer, and an upper second electrode disposed above the second dielectric layer.

REFERENCES:
patent: 4823181 (1989-04-01), Mohsen et al.
patent: 4847732 (1989-07-01), Stopper et al.
patent: 4914055 (1990-04-01), Gordon et al.
patent: 5070384 (1991-12-01), McCollum et al.
patent: 5171715 (1992-12-01), Husher et al.
patent: 5181096 (1993-01-01), Forouhi
patent: 5290734 (1994-03-01), Boardman et al.
patent: 5308795 (1994-05-01), Hawley et al.

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