Trench isolation structure and method for forming

Details Trench isolation structure and method for forming Trench isolation structure and method for forming

1994-06-17

1995-11-21

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 69, 437 67, 148DIG50, H01L 2176

Patent

active

054686768

ABSTRACT:
An isolation structure is disclosed which isolates an active region (24) from other proximate active regions. The isolation structure utilizes the combination of a LOCOS structure (26) comprising bird's beak structure (26a) and (26b). A trench (34) is formed through the LOCOS structure (26). A channel stop implant region (40) is formed along the sidewalls of the trench (34). A trench plug (46) is used to fill the trench. The isolation structure thereby uses the isolation capabilities of trench isolation structures, but prevents the leakage currents common along trench sidewalls by isolating the trench sidewalls from the active region using the LOCOS structures.

REFERENCES:
patent: 4569701 (1986-02-01), Oh
patent: 4656730 (1987-04-01), Lynch et al.
patent: 4835115 (1989-05-01), Eklund
patent: 4952524 (1990-08-01), Lee et al.
patent: 5100830 (1992-03-01), Morita
patent: 5106777 (1992-04-01), Rodder
patent: 5130268 (1992-07-01), Liou et al.

Affiliated with

Also associated with

Rating

Trench isolation structure and method for forming does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Trench isolation structure and method for forming, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Trench isolation structure and method for forming will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1136706