Surface acoustic wave device comprising piezoelectric substrate

Details Surface acoustic wave device comprising piezoelectric substrate Surface acoustic wave device comprising piezoelectric substrate

1979-04-17

1980-11-25

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

H01L 4118

Patent

active

042360951

ABSTRACT:
A surface acoustic wave device comprising a piezoelectric substrate which comprises an .alpha.-alumina layer as a base region and a zinc oxide layer as a surface region formed on the .alpha.-alumina layer. Preferably the two layers are each made of a single crystal, and the thickness of the zinc oxide layer and an angle between a crystallographic axis of the zinc oxide single crystal and the direction of wave propagation are determined so as to fall within optimum ranges, respectively. This device features an increased phase velocity and an augmented value for the electromechanical coupling coefficient and accordingly is of use at very-high to ultra-high frequencies.

REFERENCES:
patent: 3955160 (1976-05-01), Duffy
patent: 4038615 (1977-07-01), Ishiyama et al.
patent: 4097900 (1978-06-01), Moulin et al.

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