Alignment and exposure apparatus and method for manufacture of i

Details Alignment and exposure apparatus and method for manufacture of i Alignment and exposure apparatus and method for manufacture of i

1989-06-20

1990-06-26

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

353122, 355 53, G03B 2752, G03B 2770

Patent

active

049376187

ABSTRACT:
An alignment apparatus including a first off-axis alignment optical system having a magnification, and a second off-axis alignment optical system having a magnification higher than that of the first off-axis alignment optical system, wherein the apparatus is operable in a global alignment mode using the second off-axis alignment optical system. In another aspect, there is provided an alignment apparatus which includes a first off-axis alignment optical system having a magnification, a second off-axis alignment optical system having a magnification higher than that of the first off-axis alignment optical system, and a TTL alignment optical system, wherein the alignment apparatus is operable in a global alignment mode using the second off-axis alignment optical system and is operable in another global alignment mode using the TTL optical alignment system.

REFERENCES:
patent: 4589769 (1986-05-01), Matsuki
patent: 4597664 (1986-07-01), Johannsmeier et al.
patent: 4600282 (1986-07-01), Yamamura et al.
patent: 4655601 (1987-04-01), Suzuki
patent: 4659225 (1987-04-01), Takahashi
patent: 4690529 (1987-09-01), Sugiyama et al.
patent: 4708465 (1987-11-01), Isohata et al.
patent: 4711567 (1987-12-01), Tanimoto
patent: 4734746 (1988-03-01), Ushida et al.
patent: 4794426 (1988-12-01), Nishi
patent: 4811059 (1989-03-01), Hamasaki et al.
patent: 4814829 (1989-03-01), Kosugi et al.

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