Heat treatment apparatus and heat treatment method

Details Heat treatment apparatus and heat treatment method Heat treatment apparatus and heat treatment method

1989-02-21

1990-06-26

Walberg, Teresa J.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219411, 118729, 118 501, H01L 2126, F27B 109

Patent

active

049374346

ABSTRACT:
In a heat treatment apparatus, a temperature measuring element is arranged to be movable along an arrangement direction of a large number of objects placed in a process tube. A temperature distribution of a heat treatment area inside the process tube can be continuously measured by this temperature measuring element with high accuracy. As a result, internal temperature control of the process tube can be facilitated with high precision.

REFERENCES:
patent: 3311694 (1967-03-01), Lasch
patent: 3385921 (1968-05-01), Hampton
patent: 4061870 (1977-12-01), Mizushina
patent: 4423516 (1983-12-01), Mellen
patent: 4539933 (1985-09-01), Campbell
patent: 4558660 (1985-12-01), Nishizawa
patent: 4605161 (1986-08-01), Motomiya
patent: 4711989 (1987-12-01), Yu

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