Phase shifter arranging method and computer readable medium stor

Details Phase shifter arranging method and computer readable medium stor Phase shifter arranging method and computer readable medium stor

1996-12-02

1999-02-02

Trammell, James P.

Boots, shoes, and leggings

364491, 364578, 39518322, 395309, H01L 21308

Patent

active

058674012

ABSTRACT:
A phase shifter arranging method selectively arranges phase shifters on aperture patterns of a photomask so that a phase difference of .pi.radians occurs between lights transmitted through mutually adjacent aperture patterns of the photomask. The phase shifter arranging method is computer-implemented and comprises the steps of (a) extracting connections of nodes via branch as a net, where each aperture pattern is taken as a node, and mutually adjacent aperture patterns having an interval less than or equal to a predetermined value D0 are taken as nodes connected via a branch, (b) dividing the net into an open net and a closed net which are independent of each other, where the open net has no closed loop and the closed loop is other of the open loop, and (c) selectively arranging the phase shifters with respect to each of mutually independent closed nets.

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patent: 5680588 (1997-10-01), Gortych et al.
Akemi Moniwa et al.; Heuristic Method for Phase-Conflict Minimization in Automatic Phase-Shift Mask Design; Jpn. J. Appl. Phys. vol. 34, Part 1, No.12B; pp. 6584-6589; Dec. 1995.

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