Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material
Patent
1997-03-07
1999-02-02
Mintel, William
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Amorphous semiconductor material
257642, 257646, 257758, 257759, 257760, H01L 2348, H01L 2352, H01L 2940
Patent
active
058669205
ABSTRACT:
A semiconductor device, in which wiring layers are electrically isolated from each other by an insulating film which includes an amorphous carbon fluoride film insulating film containing carbon and fluorine as main components and the wiring layers are electrically connected to each other by a conductive material buried in a hole penetrating through the insulating film, is manufactured by selectively etching the amorphous carbon fluoride film. Moreover, a silicon oxide film, a silicon nitride film, or a silicon oxynitride film is formed on both of the amorphous carbon fluoride film and a side surface of said hole, or one of the amorphous carbon fluoride film and the side surface thereof.
REFERENCES:
patent: 5698901 (1997-12-01), Endo
Endo Kazuhiko
Matsumoto Yoshishige
Ohnishi Yoshitake
Tatsumi Toru
Mintel William
NEC Corporation
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