Apparatus used to align and mark wafers

Details Apparatus used to align and mark wafers Apparatus used to align and mark wafers

1997-03-24

1998-08-18

Braun, Fred L.

Photocopying

Projection printing and copying cameras

Step and repeat

G03B 2742

Patent

active

057964688

ABSTRACT:
An apparatus of the present invention includes a stage for moving a wafer in a first prescribed direction, an aligner and a marking apparatus. The aligner aligns patterns exposed by a light onto the wafer. A marking apparatus coupled to the aligner and using the light from the aligner exposes identification markings onto the wafer. Consecutive alignment and marking can be performed in the apparatus.

REFERENCES:
patent: 4880293 (1989-11-01), Gilliland et al.
patent: 5160957 (1992-11-01), Ina et al.
patent: 5262822 (1993-11-01), Kosugi et al.
patent: 5309198 (1994-05-01), Nakagawa
patent: 5386269 (1995-01-01), Kosugi
patent: 5489966 (1996-02-01), Kawashima et al.

Affiliated with

Also associated with

Rating

Apparatus used to align and mark wafers does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus used to align and mark wafers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus used to align and mark wafers will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1119594