Apparatus for manufacturing semiconductor devices

Details Apparatus for manufacturing semiconductor devices Apparatus for manufacturing semiconductor devices

1977-03-30

1978-06-13

Kilgore, Robert M.

Registers

Record controlled calculators

235470, 235487, 29569R, G06C 1500, G06K 710, G06K 1906, B01J 1700

Patent

active

040950956

ABSTRACT:
On the surface of a semiconductor wafer there is formed a binary-coded pattern which has high and low reflection portions and which contains an item of wafer processing information. A scanning device is provided to scan such patterns on individual wafers in order to obtain items of scanned information. Further a control device is provided to store the items of wafer processing information. Upon receipt of an item of scanning information, the control device produces a control signal which corresponds to the item of scanning information. The control signal is supplied to one of wafer processors, which effects on the semiconductor wafer the process necessary to manufacture a semiconductor device.

REFERENCES:
patent: 3854035 (1974-12-01), Tyler
patent: 3889355 (1975-06-01), Aronstein
patent: 3909203 (1975-09-01), Young
patent: 3999846 (1976-12-01), Sone

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