Fishing – trapping – and vermin destroying
Patent
1996-07-11
1998-08-18
Tsai, Jey
Fishing, trapping, and vermin destroying
437 52, 437919, H01L 2170, H01L 2700
Patent
active
057957940
ABSTRACT:
The present invention relates to method of manufacturing semiconductor devices having built-in capacitor comprising a dielectric substance of high dielectric constant or a ferroelectric substance as the capacitance insulation film, and aims to solve a problem that the prior art capacitance insulation film contained in semiconductor devices has a rough surface which results in a poor insulating voltage and a large spread in electrical characteristics, as well as broken connection wire; in which method a capacitance insulation film is produced by first forming a first dielectric film, and forming a second dielectric film on the first dielectric film for a thickness greater than the difference in level between top and bottom of the surface of first dielectric film, and forming a thin film whose etching speed is identical with that of the second dielectric film on the second dielectric film making the surface of thin film flat, and then etching the whole of the thin film and part of the second dielectric film off simultaneously to make the surface of second dielectric film flat.
REFERENCES:
patent: 5081559 (1992-01-01), Fazan et al.
patent: 5364811 (1994-11-01), Ajika et al.
patent: 5403766 (1995-04-01), Miyake
Fujii Eiji
Matsuda Akihiro
Nagano Yoshihisa
Nasu Toru
Matsushita Electronics Corporation
Tsai Jey
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