Interferometer for measuring a surface configuration of a test o

Details Interferometer for measuring a surface configuration of a test o Interferometer for measuring a surface configuration of a test o

1993-06-18

1995-02-07

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356360, 356354, G01B 902

Patent

active

053879759

ABSTRACT:
An interferometer utilizing interference whose object is the measurement of the configuration of a test surface with high precision by allowing accurate positioning to a predetermined measuring position for the measurement of the configuration of the test surface.
The interferometer is equipped with an alignment pattern (4A) which generates a wave front that converges at the predetermined measuring position, as well as a wave front for measuring the configuration corresponding to the design configuration of the test surface (9), and by using a test surface-reflected beam of the wave front generated by the alignment pattern, an alignment observation optical system (8) measures the displacement of the test surface from the predetermined measuring position.

REFERENCES:
patent: 4585349 (1986-04-01), Gross et al.
patent: 4848907 (1989-07-01), Yokokura et al.
patent: 4886362 (1989-12-01), Oono

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